An analysis on transmission microwave frequency spectrum of cut-off probe

被引:44
作者
Kim, D. W. [1 ]
You, S. J. [2 ]
Na, B. K. [1 ]
Kim, J. H. [2 ]
Chang, H. Y. [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea
[2] Korea Res Inst Stand & Sci, Ctr Vacuum Technol, Taejon 305306, South Korea
关键词
Langmuir probes; plasma collision processes; plasma density; plasma diagnostics; plasma pressure; plasma sheaths; ABSOLUTE ELECTRON-DENSITY; PLASMA;
D O I
10.1063/1.3634022
中图分类号
O59 [应用物理学];
学科分类号
摘要
We investigated the formation mechanism of transmission microwave frequency (TMF) spectrum of cut-off probe using a simple circuit model to elucidate the physics behind the TMF spectrum. The result showed that the overall shape of the TMF spectrum of cut-off probe (N - shape spectrum) is well reproduced with our proposed circuit model and can be understood as the combined result of two different resonances caused by the elements between two probe tips (a sheath, a plasma, and a vacuum which is filled by the plasma). Furthermore, based on this simple modeling, a more precise method to find the plasma frequency by taking account with the e-n collision frequency and the pressure limitation of the cut-off probe application is established. (C) 2011 American Institute of Physics. [doi:10.1063/1.3634022]
引用
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页数:3
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