Measuring Quality Factor From a Nonlinear Frequency Response With Jump Discontinuities

被引:34
作者
Davis, Wyatt O. [1 ]
机构
[1] MicroVision Inc, Redmond, WA 98052 USA
关键词
Damping; Duffing's equation; nonlinearity; quality factor; SILICON; DYNAMICS;
D O I
10.1109/JMEMS.2011.2159103
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The convenient half-power bandwidth formula used for measurement of quality factor Q does not apply for nonlinear systems that have jump discontinuities in their frequency responses, since one of the half-power amplitudes is not observable. This paper shows alternatives to the half-power formula that do apply to such nonlinear systems, while preserving all of the convenience of the method. Their practical use is illustrated by experimental Q measurements for a microelectromechanical systems scanning mirror.
引用
收藏
页码:968 / 975
页数:8
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