Development and characterization of transparent and conductive InZnO films by magnetron sputtering at room temperature

被引：9
作者：
Alexander, J. Nicholas [1 ,2 ]
Sun, Neville [3 ]
Sun, Richard [3 ]
Efstathiadis, Harry [1 ,2 ]
Haldar, Pradeep [1 ,2 ]
机构：
[1] SUNY Albany, Polytech Inst, Coll Nanoscale Sci, Albany, NY 12203 USA
[2] SUNY Albany, Polytech Inst, Coll Engn, Albany, NY 12203 USA
[3] Angstrom Sun Technol Inc, Acton, MA 01720 USA
来源：
JOURNAL OF ALLOYS AND COMPOUNDS | 2015年 / 633卷
基金：
美国能源部;
关键词：
Oxide materials; Semiconductors; Thin films; Electronic properties; Optical properties; OXIDE THIN-FILMS; ELECTRICAL-PROPERTIES; ELECTRODES; DEVICES; ITO;
D O I：
10.1016/j.jallcom.2015.01.302
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The electrical and optical properties of InZnO for use as a transparent conducting oxide (TCO) is reported through the investigation of the concentration of indium and oxygen in the film. InZnO films (10-30 wt.% In) were deposited by magnetron sputtering without substrate heating or annealing from a ceramic ZnO and a metallic indium target. The film's properties were investigated by X-ray photoelectric spectroscopy (XPS), 4-point probe, UV-vis spectroscopy (UV-vis), spectroscopic ellipsometry, and Hall measurements. InZnO films obtained properties with low resistivity, on the order of similar to 5.5 x 10(-4) ohm-cm, with a mobility similar to 35 cm(2)/V S, and carrier concentrations similar to 3 * 10(20) cm(-3). The band-gap ranged from 2.7 to 3.2 eV with transmission of several samples > 80%. InZnO has demonstrated properties adequate for photovoltaic applications. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码：157 / 164
页数：8
相关论文
共 22 条
[1]   Deposition and characterization of cadmium sulfide (CdS) by chemical bath deposition using an alternative chemistry cadmium precursor [J].
Alexander, J. Nicholas ;
Higashiya, Seiichiro ;
Caskey, Douglas, Jr. ;
Efstathiadis, Harry ;
Haldar, Pradeep .
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2014, 125 :47-53
[2]   Role of surfaces and interfaces in solar cell manufacturing [J].
Chandra, Abhijit ;
Anderson, Grant ;
Melkote, Shreyes ;
Gao, Wei ;
Haitjema, Han ;
Wegener, Konrad .
CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2014, 63 (02) :797-819
[3]  
Ellmer K, 2012, NAT PHOTONICS, V6, P808, DOI [10.1038/NPHOTON.2012.282, 10.1038/nphoton.2012.282]
[4]   Enhanced mobility in visible-to-near infrared transparent Al-doped ZnO films [J].
Ghosh, Tushar ;
Basak, Durga .
SOLAR ENERGY, 2013, 96 :152-158
[5]   Influence of post-annealing temperature on the properties exhibited by ITO, IZO and GZO thin films [J].
Goncalves, G. ;
Elangovan, E. ;
Barquinha, P. ;
Pereira, L. ;
Martins, R. ;
Fortunato, E. .
THIN SOLID FILMS, 2007, 515 (24) :8562-8566
[6]   Sputtered ITO for application in thin-film silicon solar cells: Relationship between structural and electrical properties [J].
Hotovy, J. ;
Huepkes, J. ;
Boettler, W. ;
Marins, E. ;
Spiess, L. ;
Kups, T. ;
Smirnov, V. ;
Hotovy, I. ;
Kovac, J. .
APPLIED SURFACE SCIENCE, 2013, 269 :81-87
[7]  
Hummel R. E., 2000, Electronic Properties of Materials
[8]   New world record efficiency for Cu(In,Ga)Se2 thin-film solar cells beyond 20% [J].
Jackson, Philip ;
Hariskos, Dimitrios ;
Lotter, Erwin ;
Paetel, Stefan ;
Wuerz, Roland ;
Menner, Richard ;
Wischmann, Wiltraud ;
Powalla, Michael .
PROGRESS IN PHOTOVOLTAICS, 2011, 19 (07) :894-897
[9]   Parameterization of the optical functions of amorphous materials in the interband region [J].
Jellison, GE ;
Modine, FA .
APPLIED PHYSICS LETTERS, 1996, 69 (03) :371-373
[10]   Effects of Mg doping rate on physical properties of Mg and Al co-doped Zn1-x-0.02MgxAl0.02O transparent conducting oxide films prepared by rf magnetron sputtering [J].
Jeong, Sang-Hun ;
Park, Jang-Ho ;
Lee, Byung-Teak .
JOURNAL OF ALLOYS AND COMPOUNDS, 2014, 617 :180-184
123