Nanometer-scale displacement sensor based on phase-sensitive diffraction grating

被引：39

作者：

Zhao, Shuangshuang ^{[1
]}

Hou, Changlun ^{[1
]}

Bai, Jian ^{[1
]}

Yang, Guoguang ^{[1
]}

Tian, Feng ^{[1
]}

机构：

[1] Zhejiang Univ, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China

来源：

APPLIED OPTICS | 2011年 / 50卷 / 10期

基金：

中国国家自然科学基金;

关键词：

D O I：

10.1364/AO.50.001413

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper, a nanometer-scale displacement sensor based on a phase-sensitive diffraction grating with interferometeric detection is described and experimentally demonstrated. The proposed displacement sensor consists of a coherent light source, a microstepping motor controller, an integrated grating, a mirror, and a differential circuit. Experimental results show that the displacement sensor has a sensitivity of about 6mV/nm and a resolution of less than 1 nm. This displacement measurement is an attractive technology with high sensitivity, broad dynamic range, good reliability, and immunity to electromagnetic interference. (C) 2011 Optical Society of America

引用

页码：1413 / 1416

页数：4

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