Integrated three-dimensional scanner for endoscopic optical coherence tomography

Numerous optical imaging techniques have been developed for clinical diagnostics; among these, optical coherence tomography (OCT) has proven to be of considerable utility due to its ability to non-destructively image below the surface of tissue. Endoscopic OCT systems will further extend the capabilities of this approach but require an additional means for scanning in two or three dimensions. We present an integrated optical microsystem which allows scanning of an optical beam in three dimensions (an area scan combined with dynamic focus) suitable for an endoscopic OCT probe. The system is defined by a tunable pneumatically-actuated micro-lens combined with an electrostatically-actuated two-axis micro-mirror, allowing functionality hitherto not achievable.