Rapid 3D Micro-Printing of Optical Whispering-Gallery Mode Resonators

被引:0
|
作者
Wu, Jushuai [1 ]
Guo, Xin [1 ,2 ]
Zhang, A. Ping [1 ]
Tam, Hwa-yaw [1 ]
Guo, Xin [1 ,2 ]
机构
[1] Hong Kong Polytech Univ, Dept Elect Engn, Hong Kong, Hong Kong, Peoples R China
[2] Zhejiang Univ, Dept Opt Engn, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China
来源
2015 IEEE 15TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO) | 2015年
关键词
3D Printing; Whispering-gallery mode resonators; Nanofabrication; NEMS;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we present a novel method for rapidly fabricating polymeric optical whispering-gallery mode (WGM) resonators. A 3D micro-printing technology based on high-power UV light source and high-speed optical spatial modulator (SLM) is developed, and the fabrication and testing of suspended-toroid WGM resonator array are demonstrated in the experiments. The experimental results reveal that the demonstrated method is very flexible and time-saving to quickly fabricate complex WGM resonators.
引用
收藏
页码:1271 / 1273
页数:3
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