Properties of ZnO:Al films on polyester produced by de magnetron reactive sputtering

被引：24
作者：
Chen, M [1 ]
Pei, ZL
Wang, X
Sun, C
Wen, LS
机构：
[1] Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China
[2] Chinese Acad Sci, Inst Met Res, Shenyang 110015, Peoples R China
来源：
MATERIALS LETTERS | 2001年 / 48卷 / 3-4期
关键词：
Al-doped ZnO (ZAO); polyester; mechanical; IR reflectance;
D O I：
10.1016/S0167-577X(00)00293-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
High preferred (002) orientation Al-doped ZnO (ZAO) films have been prepared by de magnetron reactive sputtering of an alloy target (98.5 wt.% Zn-1.5 wt.% Al) onto polyester substrates. The structural, mechanical, electrical and optical properties were investigated. The ZAO film has a sheet resistance of as low as 47.5 Omega/square and an average visible transmittance of about 70%. An average IR reflectance of about 70% in the region of 2.5-25 mum also has been obtained. (C) 2001 Elsevier Science B.V. All rights reserved.
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页码：137 / 143
页数：7
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