Low-temperature characteristics of a-Si H thin-film transistor under mechanical strain

被引:5
作者
Tsao, S. W. [2 ]
Chang, T. C. [1 ,2 ,3 ]
Yang, P. C. [2 ]
Wang, M. C.
Chen, S. C. [1 ]
Lu, J. [1 ,5 ,6 ]
Chang, T. S. [4 ]
Kuo, W. C. [1 ]
Wu, W. C. [1 ]
Shi, Y. [5 ,6 ]
机构
[1] Natl Sun Yat Sen Univ, Dept Phys, Kaohsiung 804, Taiwan
[2] Natl Sun Yat Sen Univ, Dept Photon, Kaohsiung 804, Taiwan
[3] Natl Sun Yat Sen Univ, Ctr Nanosci & Nanotechnol, Kaohsiung 804, Taiwan
[4] Natl Tsing Hua Univ, Inst Elect Engn, Hsinchu 300, Taiwan
[5] Nanjing Univ, Dept Phys, Nanjing 210093, Peoples R China
[6] Nanjing Univ, Natl Lab Solid State Microstruct, Nanjing 210093, Peoples R China
关键词
Amorphous silicon thin film transistors; Low temperature; Bending; AMORPHOUS-SILICON; ELECTRON-MOBILITY; CONDUCTION; TFT;
D O I
10.1016/j.sse.2010.07.016
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The electrical characteristics of hydrogenated amorphous silicon thin film transistors (a Si H TFTs) fabricated on stainless steel foil substrates with uniaxial outward bending were investigated at low temperatures Temperatures ranging from 77 K to 300 K were applied with experimental results showing the degradation of on-state current and threshold voltage at low temperatures Compared with the flat situation the mobility of tensile strained a Si H TFTs decreased at temperatures above 150 K but remained almost the same at temperatures below 150 K This is because outward bending will induce increase of band tail states affecting the transport mechanism differently at different temperatures (C) 2010 Elsevier Ltd All rights reserved
引用
收藏
页码:1632 / 1636
页数:5
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