Theoretical and experimental investigation of chemical mechanical polishing of W-Ni-Fe alloy

被引：40

作者：

Guo, Jiang ^{[1
]}

Shi, Xiaolin ^{[1
]}

Song, Chuanping ^{[1
]}

Niu, Lin ^{[1
]}

Cui, Hailong ^{[1
]}

Guo, Xiaoguang ^{[1
]}

Tong, Zhen ^{[2
]}

Yu, Nan ^{[3
]}

Jin, Zhuji ^{[1
]}

Kang, Renke ^{[1
]}

机构：

[1] Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian, Peoples R China

[2] Univ Huddersfield, Ctr Precis Technol, EPSRC Hub Future Metrol, Huddersfield, W Yorkshire, England

[3] Univ Edinburgh, Sch Engn, Inst Mat & Proc, Sanderson Bldg, Edinburgh EH9 3FB, Midlothian, Scotland

来源：

INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING | 2021年 / 3卷 / 02期

基金：

中国国家自然科学基金;

关键词：

chemical mechanical polishing; W-Ni-Fe alloy; grain boundary step; modelling; mechanism; MATERIAL REMOVAL RATE; TUNGSTEN-ALLOY; MICRO-CONTACT; HEAVY ALLOYS; CITRIC-ACID; MODEL; MICROSTRUCTURE; SAPPHIRE; CMP; PLANARIZATION;

D O I：

10.1088/2631-7990/abefb8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Fine finishing of tungsten alloy is required to improve the surface quality of molds and precision instruments. Nevertheless, it is difficult to obtain high-quality surfaces as a result of grain boundary steps attributed to differences in properties of two-phase microstructures. This paper presents a theoretical and experimental investigation on chemical mechanical polishing of W-Ni-Fe alloy. The mechanism of the boundary step generation is illustrated and a model of grain boundary step formation is proposed. The mechanism reveals the effects of mechanical and chemical actions in both surface roughness and material removal. The model was verified by the experiments and the results show that appropriately balancing the mechanical and chemical effects restrains the generation of boundary steps and leads to a fine surface quality with a high removal rate by citric acid-based slurry.

引用

页数：13

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