The composite system Ba0.6Sr0.4TiO3-ZnO-B2O3 for thick film preparation has been modified via copper-fluorine codoping of BST to make it suitable for the fabrication of co-fired metal-insulator-metal (MIM) components. Based on the resulting improvement of the thick films, MIM varactors and phase shifters were produced by subsequent screen-printing of silver and BST pastes as well as co-firing. Microstructural investigations showed the compatibility of silver and BST with neither chemical reaction nor cracking of the layers. The microwave characterization revealed good results regarding tunability and quality factor of the varactors and high figure of merit of 70 degrees/dB at 1.72GHz for the phase shifter.
机构:
Gyeongsang Natl Univ, Engn Res Inst, Dept Ceram Engn, Jinju Si 660701, Gyeongnam, South KoreaGyeongsang Natl Univ, Engn Res Inst, Dept Ceram Engn, Jinju Si 660701, Gyeongnam, South Korea