共 50 条
- [22] Performance and quality analysis of Mo-Si multilayers deposited by ion beam sputtering and magnetron sputtering EMERGING LITHOGRAPHIC TECHNOLOGIES X, PTS 1 AND 2, 2006, 6151 : U1008 - U1015
- [23] Exchange spring type magnet realized in FePt/Fe multilayers deposited by magnetron sputtering MICRO- AND NANOSYSTEMS-MATERIALS AND DEVICES, 2005, 872 : 63 - 68
- [28] Silicon carbide thin film deposited by unbalanced magnetron sputtering method KOREAN JOURNAL OF METALS AND MATERIALS, 2015, 53 (08): : 541 - 548
- [29] Structural changes in nanocrystalline silicon deposited by rf-magnetron sputtering APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (07): : 1813 - 1817
- [30] Influence of Deposition Parameters on Silicon Thin Films Deposited by Magnetron Sputtering 2017 IEEE 44TH PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC), 2017, : 2646 - 2649