Applications of diamond-like carbon thin films

被引：186
|
作者：
Lettington, AH [1 ]
机构：
[1] Univ Reading, JJ Thomson Phys Lab, Reading RG6 6AF, Berks, England
来源：
CARBON | 1998年 / 36卷 / 5-6期
关键词：
diamond-like carbon; amorphous carbon; optical properties; mechanical properties;
D O I：
10.1016/S0008-6223(98)00062-1
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Diamond-like carbon (DLC) does not have a unique composition but consists of a mixture of amorphous and crystalline phases. It is otherwise known as amorphous hydrogenated carbon. This paper reviews the preparation and properties of DLC films and their use in infrared optical, mechanical, electronic and biomedical applications. (C) 1998 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：555 / 560
页数：6
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