Refractive-Index Sensor Incorporating a Polymeric Waveguide Overlaid with TiO2 Thin Films

被引:0
作者
Son, Geun-Sik [1 ]
Kwon, Soon-Woo [2 ]
Kim, Woo-Kyung [3 ]
Yang, Woo-Seok [3 ]
Lee, Hyung-Man [3 ]
Lee, Han-Young [3 ]
Lee, Sung-Dong [4 ]
Lee, Sang-Shin [1 ]
机构
[1] Kwangwoon Univ, Dept Elect Engn, Seoul, South Korea
[2] Sungkyunkwan Univ, Sch Adv Mat Sci & Engn, Suwon, South Korea
[3] Nano Bio Res Ctr, Korea Elect Technol Inst, Seongnam, South Korea
[4] Infopia, Anyang, South Korea
来源
INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XIII | 2009年 / 7218卷
关键词
sensor; waveguide; polymer; optical; refractive index; film;
D O I
10.1117/12.808860
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A refractive index sensor based on a three-layered polymeric waveguide was proposed and demonstrated. A high-index thin film in TiO2 was placed on top of the waveguide in the sensing region, playing the role of strengthening the evanescent field to enhance the sensitivity of the sensor. The refractive index of the analyte applied to the surface of the sensor was estimated by observing the count of the polarimetric interference between the TE and TM polarizations, which is manifested as a periodic variation in the optical output of the sensor. For a fabricated sensor involving a 20 nm thick TiO2 film, the sensitivity was found to be equivalent to 1.8x10(-3) RIU. It was found to be enhanced by increasing the thickness of the high-index overlay to a certain degree.
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页数:10
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