Diffusion and evolution of hydrogen in hydrogenated amorphous and microcrystalline silicon

被引：110

作者：

Beyer, W ^{[1
]}

机构：

[1] Forschungszentrum Julich, Inst Photovoltaik, D-52425 Julich, Germany

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 2003年 / 78卷 / 1-4期

关键词：

microcrystalline silicon; diffusion; evolution;

D O I：

10.1016/S0927-0248(02)00438-5

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Hydrogen (H) diffusion and evolution effects in hydrogenated amorphous and microcrystalline silicon (Si) films are discussed. Numerous diffusion and evolution related effects have been discovered and various models for H motion, trapping and evolution effects have been proposed. Microstructure and H diffusion and evolution effects are found to be strongly interdependent. Various aspects of H diffusion in compact material are consistent with a trapping/detrapping motion of atomic H, restricted by H solubility effects and describable in terms of an equilibrium band model. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：235 / 267

页数：33

共 116 条

[31]

BEYER W, 1988, MATER RES SOC S P, V118, P291

[32]

BEYER W, 2002, UNPUB P PV EUR C ROM

[33]

BEYER WF, UNPUB

[34] HYDROGEN EVOLUTION AND DEFECT CREATION IN AMORPHOUS SI-H ALLOYS [J].

BIEGELSEN, DK ;

STREET, RA ;

TSAI, CC ;

KNIGHTS, JC .

PHYSICAL REVIEW B, 1979, 20 (12) :4839-4846

[35] LIGHT-ENHANCED DEEP DEUTERIUM EMISSION AND THE DIFFUSION MECHANISM IN AMORPHOUS-SILICON [J].

BRANZ, HM ;

ASHER, SE ;

NELSON, BP .

PHYSICAL REVIEW B, 1993, 47 (12) :7061-7066

[36] Light-induced D diffusion measurements in hydrogenated amorphous silicon: Testing H metastability models [J].

Branz, HM ;

Asher, S ;

Gleskova, H ;

Wagner, S .

PHYSICAL REVIEW B, 1999, 59 (08) :5513-5520

[37]

BRANZ HM, 1993, MATER RES SOC SYMP P, V297, P279, DOI 10.1557/PROC-297-279

[38] Fermi-level dependence of the charge state of diffusing hydrogen in amorphous silicon [J].

Branz, HM ;

Reedy, R ;

Crandall, RS ;

Mahan, H ;

Xu, YQ ;

Nelson, BP .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 2002, 299 :191-195

[39]

BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556

[40] EXPLOSIVE ISOTHERMAL HYDROGEN EXODIFFUSION IN VHF-GD A-SI-H THICK LAYERS [J].

BUSTARRET, E ;

BRANDT, M ;

STUTZMANN, M ;

FAVRE, M .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1991, 137 :53-56

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