共 6 条
[1]
[Anonymous], SENSORS ACTUATORS
[3]
NORMALLY CLOSED MICROVALVE AND MICROPUMP FABRICATED ON A SILICON-WAFER
[J].
SENSORS AND ACTUATORS,
1989, 20 (1-2)
:163-169
[4]
Shinohara J., 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), P86, DOI 10.1109/MEMSYS.2000.838495
[6]
Normally-closed peristaltic micropump with re-usable actuator and disposable fluidic chip
[J].
SENSORS AND ACTUATORS B-CHEMICAL,
2011, 154 (02)
:137-141