Parameters Optimization for a Capacitive Six-Axis Force/Torque Sensor by Using Analytical Method

被引：5

作者：

Luo, Qi ^{[1
]}

Liang, Quan ^{[1
]}

Zhang, Jinhao ^{[1
]}

Zhao, Rendong ^{[1
]}

Ai, Zhenjun ^{[1
]}

Pu, Minghui ^{[1
]}

机构：

[1] Guangxi Univ, Sch Mech Engn, Nanning 530004, Peoples R China

来源：

IEEE SENSORS JOURNAL | 2022年 / 22卷 / 22期

关键词：

Sensors; Capacitors; Capacitive sensors; Capacitance; Optimization; Sensitivity; Performance evaluation; Capacitive six-axis force; torque (F; T) sensor; capacitor; parameters optimization; performance evaluation function; SHAPE-OPTIMIZATION; FORCE;

D O I：

10.1109/JSEN.2022.3213265

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Parameters optimization is crucial for improving the sensing performance of capacitive six-axis force/torque (F/T) sensors. Based on the analytical model, this article designed a capacitor for sensing the different axis F/T as well as presented a novel performance evaluation function for the parameters optimization. This performance evaluation function can effectively represent the relationship between structural parameters and the sensor sensitivity as well as the isotropy. From the results of the parameters optimization, the sensor is manufactured and the experimental evaluation is analyzed. Comparing with the commercial six-axis F/T capacitive sensor, there is a more superior sensing performance for the developed sensor. This proposed parameters optimization method is expected to improve the sensing performance for the capacitive six-axis F/T sensor and expand its application.

引用

页码：21735 / 21744

页数：10

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