Effect of Ni doping on the microstructure and toughness of CrAlN coatings deposited by magnetron sputtering

被引:13
作者
Wang, Yu-Xing [1 ]
Tang, Yu-Jiao [1 ]
Wan, Wen [1 ]
Zhang, Xia [2 ]
机构
[1] Shanghai Urban Construct Vocat Coll, Sch Mech Engn & Informat, Shanghai 201415, Peoples R China
[2] Zhejiang Univ Technol, Coll Mat Sci & Engn, Hangzhou 310014, Peoples R China
关键词
Ni doping; CrAlN coatings; microstructure; toughness; magnetron sputtering; TRIBOLOGICAL PROPERTIES; THERMAL-STABILITY; CRNIN COATINGS; HARD; FILMS;
D O I
10.1088/2053-1591/ab70dc
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This study determines the effects of nickel (Ni) doping on the composition, phase structure, chemical valence state, hardness, and toughness of CrAlNiN coatings. CrAlNiN coatings with various Ni contents (0.00 at%-27.71 at%) were deposited on the surfaces of M2 tool steel and monocrystalline silicon (Si) using unbalanced magnetron sputter ion plating. The results showed that the CrAlNiN coatings possess a nanomultilayer structure, maintaining the face centered cubic crystal structure of the chromium aluminum nitride (CrAlN) coatings. The Ni in the coatings acts as a toughening phase to ease stress, to increase resistance to crack growth, and to delay the generation of cracks, thereby having an obvious toughening effect. At an Ni content of approximately 20.33%, the Ni toughening phase in the modulation layer tends to saturate and the effect of continuing the increase in Ni content is limited from the viewpoint of improving the toughness.
引用
收藏
页数:8
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共 21 条
  • [1] Effect of Ni addition on the structure and properties of Cr-Ni-N coatings deposited by closed-field unbalanced magnetron sputtering ion plating
    Cheng, W. L.
    Zhou, Z. F.
    Shum, P. W.
    Li, K. Y.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2013, 229 : 84 - 89
  • [2] The influence of plasma nitriding on microstructure and properties of CrN and CrNiN coatings on Ti6Al4V by magnetron sputtering
    Jin, Jie
    Duan, Hejie
    Li, Xiaohan
    [J]. VACUUM, 2017, 136 : 112 - 120
  • [3] Thermal stability of ZrN-Ni and CrN-Ni superhard nanocomposite coatings
    Karvánková, P
    Männling, HD
    Eggs, C
    Veprek, S
    [J]. SURFACE & COATINGS TECHNOLOGY, 2001, 146 : 280 - 285
  • [4] Hard nanocomposite Zr-Y-N coatings, correlation between hardness and structure
    Musil, J
    Poláková, H
    [J]. SURFACE & COATINGS TECHNOLOGY, 2000, 127 (01) : 99 - 106
  • [5] Park JK, PLASMA PROCESSES POL, V4, pS902
  • [6] Mechanical, Microstructural and Tribological Properties of Reactive Magnetron Sputtered Cr-Mo-N Films
    Qi, Dongli
    Lei, Hao
    Wang, Tiegang
    Pei, Zhiliang
    Gong, Jun
    Sun, Chao
    [J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2015, 31 (01) : 55 - 64
  • [7] Magnetron sputtered Cr-Ni-N and Ti-Mo-N films: comparison of mechanical properties
    Regent, F
    Musil, J
    [J]. SURFACE & COATINGS TECHNOLOGY, 2001, 142 : 146 - 151
  • [8] Wear behaviour of wear-resistant adaptive nano-multilayered Ti-Al-Mo-N coatings
    Sergevnin, V. S.
    Blinkov, I. V.
    Volkhonskii, A. O.
    Belov, D. S.
    Kuznetsov, D. V.
    Gorshenkov, M. V.
    Skryleva, E. A.
    [J]. APPLIED SURFACE SCIENCE, 2016, 388 : 13 - 23
  • [9] Microstructure and indentation toughness of Cr/CrN multilayer coatings by arc ion plating
    Song, Gui-hong
    Luo, Zhuo
    Li, Feng
    Chen, Li-jia
    He, Chun-lin
    [J]. TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA, 2015, 25 (03) : 811 - 816
  • [10] CHARACTERIZATION OF RF MAGNETRON-SPUTTERED CrCuN AND CrNiN COATINGS BY NANOINDENTATION
    Tan, Shuyong
    Liu, Xiaohui
    Zhang, Xuhai
    Fang, Feng
    Wang, Zhangzhong
    [J]. SURFACE REVIEW AND LETTERS, 2017, 24 (07)