Performance enhancement in Quantum Well Infrared Photodetector utilizing the Grating Structure

被引:0
|
作者
Lee, Ming-Lun [1 ]
Hsieh, Cheng-Ju [1 ]
You, Yao-Hong [1 ]
Su, Vin-Cent [1 ]
Chen, Po-Hsun [1 ]
Lin, Hung-Chou [1 ]
Yang, Han-Bo [1 ]
Chen, Hung-Ming [1 ]
Kuan, Chieh-Hsiung [1 ]
机构
[1] Natl Taiwan Univ, Grad Inst Elect Engn, Taipei 10617, Taiwan
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We fabricate four different size grating structure on the top of the quantum well infrared photodetectors, then etch them into four different etching depth. With suitable design, the peak responsivity of the QWIPs is about thirteen times larger than that of the conventional QWIP.
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页数:2
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