The microfabrication of capacitive ultrasonic transducers

被引：0
作者：
Jin, XC
Ladabaum, I
KhuriYakub, BT
机构：
来源：
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 1997年
关键词：
micromachining; ultrasonic transducer; capacitive transducer;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The successful fabrication of surface micromachined ultrasonic transducers is reported. In a key step of the microfabrication, amorphous silicon is used as a sacrificial layer to form sealed nitride cavities. The process is fully CMOS compatible and allows for improved geometric control compared to previously reported work. Transmission experiments in both water and air are presented. A dynamic range in excess of 110dB is observed in air at 2.3MHz. In water, a single pair of transducers is able to operate from 2MHz to 20MHz. When tuned, a 3MHz tone burst results in a received signal with better than 80dB signal to noise ratio. The transducer behavior agrees with theoretical understanding of transducer dynamics.
引用
收藏
页码：437 / 440
页数：4
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