Facile micropatterning of mesoporous titania film by low-energy electron beam irradiation

被引：9

作者：

Hozumi, Atsushi ^{[1
]}

Cheng, Dalton F. ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Moriyama Ku, Nagoya, Aichi 4638560, Japan

来源：

MATERIALS CHEMISTRY AND PHYSICS | 2011年 / 129卷 / 1-2期

关键词：

Mesoporous titania film; Low-energy electron beam; Micropatterning; Photocalcination; INORGANIC COMPOSITE FILMS; TIO2; THIN-FILMS; PHOTOCATALYTIC ACTIVITY; NANOCRYSTALLINE ANATASE; HIGHLY CRYSTALLINE; OZONE TREATMENT; SILICA FILMS; DYE; SURFACTANT; CALCINATION;

D O I：

10.1016/j.matchemphys.2011.04.048

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A facile method to prepare ordered mesoporous titania films by low-energy electron beam (LEEB) irradiation was demonstrated. A possibility of one-pot micropatterning of the mesoporous titania film was discussed through site-selective LEEB irradiation. The LEEB irradiation (25 kV, 300 mu A) was useful for rapid removal of surfactant molecules (within similar to 5 min at similar to 3 Pa) with the retention of mesostructure even when the mesostructure was constructed by lightly condensed titania frameworks. The titania frameworks in the LEEB-irradiated regions were sufficiently cross-linked and consolidated, so that one-pot micropatterning of mesoporous titania film (for example, 25 mu m x 25 mu m features) was also possible by site-selective LEEB irradiation, followed by washing away unirradiated regions with water. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：464 / 470

页数：7

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