Automated system for interferometric out-of-plane and in-plane microelements measurement

被引：0

作者：

Kacperski, J ^{[1
]}

Sykula, T ^{[1
]}

Kujawinska, M ^{[1
]}

Salbut, L ^{[1
]}

机构：

[1] Warsaw Univ Technol, Inst Micromech & Photon, PL-00661 Warsaw, Poland

来源：

PHOTONICS APPLICATIONS IN ASTRONOMY, COMMUNICATIONS, INDUSTRY, AND HIGH-ENERGY PHYSICS EXPERIMENTS | 2003年 / 5125卷

关键词：

microelement (MEMS) testing; interferometry; grating (moire) interferometry; microloading machine; waveguide interferometer;

D O I：

10.1117/12.531537

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The automated system for microelement testing, which consists of Twyman-Green interferometer and waveguide grating interferometer integrated with optical microscope is presented. The microscope is additionally equipped with mechanisms to fix, microposition and load a specimen under study. Full-field analysis of out-of-plane and in-plane displacements of microelements is performed at this study. The applicability of the system is proven by performing tests of silicon membrane and silicon beam.

引用

页码：427 / 433

页数：7

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