Boron distribution in the subsurface region of heavily doped IIb type diamond

被引:33
作者
Mavrin, B. N. [1 ]
Denisov, V. N. [1 ,3 ]
Popova, D. M. [1 ]
Skryleva, E. A. [2 ]
Kuznetsov, M. S. [3 ]
Nosukhin, S. A. [3 ]
Terentiev, S. A. [3 ]
Blank, V. D. [3 ]
机构
[1] Russian Acad Sci, Inst Spectroscopy, Troitsk 142190, Moscow Region, Russia
[2] Moscow State Inst Steel & Alloys, Moscow 119049, Russia
[3] Technol Inst Superhard & Novel Carbon Mat, Troitsk 142190, Moscow Region, Russia
关键词
diamond; boron; XPS; Raman spectra;
D O I
10.1016/j.physleta.2008.02.064
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
For the first time investigations of the boron distribution in the subsurface region of HPHT boron-doped diamond that is promising for applications in electronics were carried out by X-ray photoelectron (XPS) and Raman spectroscopy. It was found from XPS data that the boron content decreased gradually more than one order of magnitude in depth of surface. The first-principle calculations have shown that the Raman polarizability in the crossed polarization configuration should increase considerably with boron doping. The Raman spectra from as-grown and polished surfaces of heavily boron-doped diamond are discussed in the context of theoretical results. (c) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:3914 / 3918
页数:5
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