A polymer chip-integrable piezoelectric micropump with low backpressure dependence

被引:11
作者
Conde, A. J. [1 ]
Bianchetti, A. [2 ]
Veiras, F. E. [2 ,3 ]
Federico, A. [2 ]
Cabaleiro, J. M. [4 ,5 ]
Dufva, M. [6 ]
Madrid, R. E. [7 ]
Fraigi, L. [1 ]
机构
[1] INTI, CMNB, San Mart, Buenos Aires, Argentina
[2] INTI, Elect & Informat, San Mart, Buenos Aires, Argentina
[3] FIUBA, GLOmAe, Lab Sistemas Liquidos, Buenos Aires, DF, Argentina
[4] FIUBA, Lab Sistemas Liquidos, Buenos Aires, DF, Argentina
[5] UdeMM, Lab Micro & Nanofluid & Plasma, Buenos Aires, DF, Argentina
[6] Tech Univ Denmark, DTU Nanotech, Odense, Denmark
[7] Consejo Nacl Invest Cient & Tecn, Inst Super Invest Biol INSIBIO, FACET UNT, Dept Bioingn, San Miguel De Tucuman, Argentina
关键词
VALVES; MICROFLUIDICS; ACTUATOR; UNIMORPH; SYSTEMS;
D O I
10.1039/c5ra08819d
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We describe a piezoelectric micropump constructed in polymers with conventional machining methods. The micropump is self-contained and can be built as an independent device or as an on-chip module within laminated microfluidic chips. We demonstrate on-chip integrability by the fabrication and testing of an active micromixer with two pumps. Average flow rates from sub-mu l min(-1) to 300 mu l min(-1) can be obtained with low influence from the backpressure up to approximately 10 kPa. The micropump design allows potential use in low-cost disposable polymeric Lab on a Chip devices.
引用
收藏
页码:49996 / 50000
页数:5
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