Advanced LIGA technology for the integration of an electrostatically controlled bearing in a wobble micromotor

被引：7

作者：

Samper, VD ^{[1
]}

Sangster, AJ

Wallrabe, U

Reuben, RL

Grund, JK

机构：

[1] Heriot Watt Univ, Dept Elect & Comp Engn, Edinburgh EH14 4AS, Midlothian, Scotland

[2] Nanyang Technol Univ, MEMS Grp, Nanyang, Singapore

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1998年 / 7卷 / 04期

关键词：

electrostatic bearing; electrostatic motor; LIGA process; micromotor; wobble motor;

D O I：

10.1109/84.735351

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work concerns the alleviation of friction in a novel design of multistator electrostatic wobble motor. The output torque and the kinematic accuracy of this device are limited by the sliding friction between the rotor and the top surface of the bearing. A solution for an axial bearing has been developed using an advanced LIGA technique to integrate polymethylmethacrylate (PMMA) cylinders into nickel micro structures. A new version of the micromotor has been fabricated, utilizing an axial electrostatic field to hold the rotor against an engineered sliding surface. The integrated bearing stabilizes the rotor and potentially permits operation in liquid environments by sealing the stator electrodes. [334].

引用

页码：423 / 427

页数：5

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