Superconducting Resonators Based on TiN/Tapering/NbN/Tapering/TiN Heterostructures

被引：4

作者：

Tang, Yong-Chao ^{[1
,2
]}

Zhang, Hui ^{[1
,2
]}

Kwon, Sangil ^{[2
]}

Mohebbi, Hamid R. ^{[2
]}

Cory, David G. ^{[2
,3
,4
,5
]}

Peng, Li-Cong ^{[6
]}

Gu, Lin ^{[6
]}

Guo, Hai-Zhong ^{[6
]}

Jin, Kui-Juan ^{[6
]}

Miao, Guo-Xing ^{[1
,2
]}

机构：

[1] Univ Waterloo, Dept Elect & Comp Engn, Waterloo, ON N2L 3G1, Canada

[2] Univ Waterloo, Inst Quantum Comp, Waterloo, ON N2L 3G1, Canada

[3] Univ Waterloo, Dept Chem, Waterloo, ON N2L 3G1, Canada

[4] Perimeter Inst Theoret Phys, Waterloo, ON N2L 2Y5, Canada

[5] Canada Inst Adv Res, Toronto, ON M5G 1Z8, Canada

[6] Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China

来源：

ADVANCED ENGINEERING MATERIALS | 2016年 / 18卷 / 10期

基金：

加拿大自然科学与工程研究理事会;

关键词：

KINETIC INDUCTANCE DETECTORS; PENETRATION DEPTH; PROXIMITY; MULTILAYERS; NIOBIUM; PHOTON; LAYERS; FILMS;

D O I：

10.1002/adem.201600226

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We fabricated a type of superconducting heterostructures, TiN/tapering/NbN/tapering/TiN, on c-cut sapphire substrates by reactive magnetron sputtering. The goal is to achieve an x-band resonator that maintains a high Q in modest magnetic fields. The structure shows (111) orientation with local epitaxial correlation, as a result of stacking face-centered-cubic structures on top of hexagonal-close-packing substrates. The artificial tapering layers vary gradually from NbN into TiN and vice versa, creating a smooth transition so that no distinct interface exists. We characterized microstrip single line resonators on these heterostructures that are promising candidates for quantum information processing with hybrid nuclear-electron spins.

引用

页码：1816 / 1822

页数：7

共 41 条

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