INTEGRATED RESONANT DUAL-MICROCANTILEVERS COMBINED SENSOR WITH ACCURATE IDENTIFICATION AND HIGHLY-SENSITIVE DETECTION TO H2S GAS

被引：0
|
作者：
Tan, Lei [1 ,2 ]
Xu, Pengcheng [1 ]
Li, Ming [1 ]
Yu, Haitao [1 ]
Li, Xinxin [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
[2] Shanghai Normal Univ, Coll Life & Environm Sci, Shanghai 200234, Peoples R China
来源：
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年
基金：
国家重点研发计划;
关键词：
Gas sensor; resonant microcantilever; selective detection; distinguish; H2S; ppb; HYDROGEN-SULFIDE; GRAVIMETRIC DETECTION; SENSING MATERIAL; NANOFIBERS; HALITOSIS; DIAGNOSIS;
D O I：
10.1109/transducers.2019.8808199
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper shows a novel integrated resonant dual-microcantilevers combined gas sensor which can identify and detect trace-level H2S. With two kinds of specially designed sensing materials loaded respectively, one cantilever can identify H2S by outputting positive frequency shift signals, while the other cantilever will detect H2S as a normally used cantilever sensor with negative frequency shifts. Experiments show that the sensor can distinguish H2S from a variety of common gases, and the detection limit to H2S is as sensitive as a few ppb.
引用
收藏
页码：338 / 341
页数：4
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