Progress in replication of substrates for multilayer coatings

被引:6
作者
Romaine, S [1 ]
Everett, J [1 ]
Bruni, R [1 ]
Ivan, A [1 ]
Gorenstein, P [1 ]
Ghigo, M [1 ]
Mazzoleni, F [1 ]
Citterio, O [1 ]
Pedulla, J [1 ]
机构
[1] Harvard Smithsonian Ctr Astrophys, Cambridge, MA 02138 USA
来源
X-RAY OPTICS, INSTRUMENTS, AND MISSIONS | 1998年 / 3444卷
关键词
X-ray telescopes; multilayers; replicated substrates;
D O I
10.1117/12.331277
中图分类号
P1 [天文学];
学科分类号
0704 ;
摘要
Studies are being carried out to compare the performance of several different separation materials used in the replication process. This report presents the results obtained during the second year of a program which consists of replicating smooth, thin substrates, depositing multilayer coatings upon them, and evaluating their performance. Replication and multilayer coatings are both critically important to the development of focussing hard X-ray telescopes that function up to 100 keV. The activities of the current year include extending the comparison between sputtered amorphous carbon and evaporated gold to include sputtered as well as evaporated gold. The figure of merit being the smoothness of the replica which has a direct effect on the specular reflectivity. These results were obtained with epoxy replication, but they should be applicable to electroformed nickel, the process we expect to use for the ultimate replicated optics.
引用
收藏
页码:564 / 568
页数:5
相关论文
共 4 条
[1]   Correlation between X-ray reflectivity measurements and surface roughness of AXAF coated witness samples [J].
Clark, AM ;
Bruni, RJ ;
Romaine, SE ;
Schwartz, DA ;
VanSpeybroeck, L ;
Yip, PW ;
Drehman, AJ ;
Shapiro, AP .
MULTILAYER AND GRAZING INCIDENCE X-RAY/EUV OPTICS III, 1996, 2805 :268-276
[2]  
JOENSEN KD, 1993, P SOC PHOTO-OPT INS, V1736, P239, DOI 10.1117/12.140479
[3]   Application of multilayer coatings to replicated substrates [J].
Romaine, S ;
Hussain, A ;
Everett, J ;
Clark, A ;
Bruni, R ;
Gorenstein, P ;
Ghigo, M ;
Mazzoleni, F ;
Citterio, O ;
Pedulla, J .
GRAZING INCIDENCE AND MULTILAYER X-RAY OPTICAL SYSTEMS, 1997, 3113 :253-259
[4]   SURFACE FINISH REQUIREMENTS FOR SOFT-X-RAY MIRRORS [J].
WINDT, DL ;
WASKIEWICZ, WK ;
GRIFFITH, JE .
APPLIED OPTICS, 1994, 33 (10) :2025-2031