Field emission from diamond nanotips for scanning probe lithography

被引：28

作者：

Hofmann, Martin ^{[1
]}

Lenk, Claudia ^{[1
]}

Ivanov, Tzvetan ^{[1
]}

Rangelow, Ivo W. ^{[1
]}

Reum, Alexander ^{[2
]}

Ahmad, Ahmad ^{[2
]}

Holz, Mathias ^{[2
]}

Manske, Eberhard ^{[3
]}

机构：

[1] Tech Univ Ilmenau, MNES, IMNE, Gustav Kirchhoff Str 1, D-98693 Ilmenau, Germany

[2] Nano Analyt GmbH, Ehrenbergstr 1, D-98693 Ilmenau, Germany

[3] Tech Univ Ilmenau, PMS, Gustav Kirchhoff Str 1, D-98693 Ilmenau, Germany

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2018年 / 36卷 / 06期

关键词：

ATOMIC-FORCE MICROSCOPE; ELECTRON-BEAM LITHOGRAPHY; SINGLE-CRYSTAL DIAMOND; DIRECT-WRITE; HIGH-SPEED; RESOLUTION LIMITS; SURFACE; SILICON; FABRICATION; MECHANISM;

D O I：

10.1116/1.5048193

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Single-digit nanometer lithography is a basic requirement for beyond CMOS devices. To address this lithography challenge, a variety of different lithographic methods were developed. Here, the authors present the possibility of field emission scanning probe lithography (FE-SPL) with a diamond tip in order to enhance the lifetime of the used tip. A superior mechanical hardness and a good electron emission stability even after a total of 48 h of lithographic patterning by FE-SPL were proven, and features with half pitches down to 15 nm have been fabricated. Published by the AVS.

引用

页数：6

共 97 条

[1] Focused ion beam milling of diamond:: Effects of H2O on yield, surface morphology and microstructure
Adams, DP
Vasile, MJ
Mayer, TM
Hodges, VC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (06): : 2334 - 2343
[2] Fabrication of advanced probes for atomic force microscopy using focused ion beam
Ageev, O. A.
Kolomiytsev, A. S.
Bykov, A. V.
Smirnov, V. A.
Kots, I. N.
[J]. MICROELECTRONICS RELIABILITY, 2015, 55 (9-10) : 2131 - 2134
[3] A computational study on tuning the field emission and electronic properties of BN nanocones by impurity atom doping
Ahmadi, S.
Nezhad, P. Delir Kheirollahi
Hosseinian, A.
Vessally, E.
[J]. PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2018, 100 : 63 - 68
[4] Parallel-local anodic oxidation of silicon surfaces by soft stamps
Albonetti, Cristiano
Martinez, Javier
Losilla, Nuria S.
Greco, Pierpaolo
Cavallini, Massimiliano
Borgatti, Francesco
Montecchi, Monica
Pasquali, Luca
Garcia, Ricardo
Biscarini, Fabio
[J]. NANOTECHNOLOGY, 2008, 19 (43)
[5] Amaratunga GAJ, 1996, APPL PHYS LETT, V68, P2529, DOI 10.1063/1.116173
[6] Andrianova N.N., 2016, PHYSICS, V80, P156, DOI DOI 10.3103/S1062873816020040
[7] ATOMIC FORCE MICROSCOPE
BINNIG, G
QUATE, CF
GERBER, C
[J]. PHYSICAL REVIEW LETTERS, 1986, 56 (09) : 930 - 933
[8] TUNNELING THROUGH A CONTROLLABLE VACUUM GAP
BINNIG, G
ROHRER, H
GERBER, C
WEIBEL, E
[J]. APPLIED PHYSICS LETTERS, 1982, 40 (02) : 178 - 180
[9] SCANNING TUNNELING MICROSCOPY
BINNIG, G
ROHRER, H
[J]. SURFACE SCIENCE, 1983, 126 (1-3) : 236 - 244
[10] Optical and electrical properties of synthetic single-crystal diamond under high-fluence ion irradiation
Borisov A.M.
Kazakov V.A.
Mashkova E.S.
Ovchinnikov M.A.
Palyanov Y.N.
Popov V.P.
Shmytkova E.A.
[J]. Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, 2017, 11 (3) : 619 - 624

← 1 2 3 4 5 6 7 8 9 10 →