共 48 条
[21]
FRUCHTMAN A, 2006, 33 EUR PHYS SOC C PL
[22]
FRUCHTMAN A, UNPUB PLASMA SOURCES
[24]
Godyak V.A., 1986, SOVIET RADIO FREQUEN
[27]
KOMURASAKI K, 1996, 32 JOINT PROP C LAK
[29]
Lieberman M. A., 1994, Principles of Plasma Discharges and Materials Processing, V1st ed.