共 5 条
[1]
Electromagnetic micro x-y stage with very thick Cu coil for probe-based mass data storage device
[J].
SMART STRUCTURES AND MATERIALS 2001: SMART ELECTRONICS AND MEMS,
2001, 4334
:363-371
[4]
Suzuki G., 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), P46, DOI 10.1109/MEMSYS.2000.838488
[5]
ZHANG ZL, 1996, Patent No. 5536988