Structural, mechanical and corrosion properties of TiOxNy/ZrOxNy multilayer coatings

被引：15

作者：

Balaceanu, M. ^{[1
]}

Braic, V. ^{[1
]}

Braic, M. ^{[1
]}

Kiss, A. ^{[1
]}

Zoita, C. N. ^{[1
]}

Vladescu, A. ^{[1
]}

Drob, P. ^{[2
]}

Vasilescu, C. ^{[2
]}

Dudu, D. ^{[3
]}

Muresanu, O. ^{[3
]}

机构：

[1] Natl Inst Optoelect, RO-77125 Magurele, Romania

[2] Acad Romana, Inst Phys Chem IG Murgulescu, RO-60021 Bucharest, Romania

[3] Natl Inst Phys & Nucl Engn Horia Hulubei, RO-77125 Magurele, Romania

来源：

SURFACE & COATINGS TECHNOLOGY | 2008年 / 202卷 / 11期

关键词：

coatings; corrosion resistance; pulsed magnetron sputtering; multilayer oxynitrides;

D O I：

10.1016/j.surfcoat.2007.09.032

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Results on the deposition and characterization of TiOxNy/ZrOxNy multilayers, with bilayer periods of 20 and 400 nm, are presented. The coatings were deposited on TiNiNb alloy substrates by the pulsed magnetron sputtering method. The elemental composition, hardness, adhesion and corrosion resistance of the coatings were analyzed. As resulted from the XPS analysis, the individual layers consisted of a mixture of titanium or zirconium oxynitrides and corresponding oxides. X-ray analysis revealed that the coatings were amorphous. Only slight differences between the microhardness and adhesion values of the coatings with small and large bilayer period A were found. The experiments also showed that the multilayered coatings improved the corrosion resistance of the uncoated alloy and reduced the amount of ion release in artificial body fluids. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：2384 / 2388

页数：5

共 22 条

[1] TiN/ZrN heterostructures deposition and characterisation [J].