MEMS Aided Design Method Based on 3D Features

被引：0

作者：

Zhang, Changfu ^{[1
]}

Wang, Lijuan ^{[2
]}

机构：

[1] Xian Technol Univ, Sch Mech & Elect Engn, Xian 710032, Peoples R China

[2] Xian Technol Univ, Dept Informat Studies, Xian 710032, Peoples R China

来源：

APPLIED MECHANICS AND MECHANICAL ENGINEERING, PTS 1-3 | 2010年 / 29-32卷

关键词：

micro electro mechanical system; design; three dimensional features;

D O I：

10.4028/www.scientific.net/AMM.29-32.2302

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

A new design method for surface micromachined devices is proposed to reduce process complexity and improve intuitiveness of traditional design method of mask-to-shape-to-function. In the method, solid geometric models of MEMS devices are efficiently built up by selecting 3D features from the established MEMS feature database. Mask and process flow can be automatically generated with the developed aided design system based on SolidWorks. A practical example shows that the design method can shorten design cycle and improve design success rate.

引用

页码：2302 / +

页数：3

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