CoFe-Coated carbon nanotube probes for magnetic force microscope

被引:27
作者
Kuramochi, H [1 ]
Akinaga, H
Semba, Y
Kijima, N
Uzumaki, T
Yasutake, M
Tanaka, A
Yokoyama, H
机构
[1] Natl Inst Adv Ind Sci & Technol, AIST, Res Consortium Synth Nanofunct Mat Project, SYNAF, Tsukuba, Ibaraki 3058568, Japan
[2] SII NanoTechnol Inc, Shizuoka 4101393, Japan
[3] AIST, Nanotechnol Res Inst, Tsukuba, Ibaraki 3058568, Japan
[4] Fujitsu Co Ltd, Atsugi, Kanagawa 2430197, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2005年 / 44卷 / 4A期
关键词
carbon nanotube probe; magnetic force microscope; ferromagnetic film; perpendicular magnetic storage media;
D O I
10.1143/JJAP.44.2077
中图分类号
O59 [应用物理学];
学科分类号
摘要
CoFe-coated carbon nanotube (CNT) probes have been successfully fabricated by a radio-frequency sputtering method. The sputtering conditions for obtaining a uniform ferromagnetic film on the CNT probe were investigated. The optimal sputtering conditions were determined from the observations using a scanning electron microscope and an atomic force microscope. CNT magnetic force microscope (MFM) probes prepared under optimized conditions provided us clear images with an ultimate lateral resolution of approximately 10 nm.
引用
收藏
页码:2077 / 2080
页数:4
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