Model Reference Zero Vibration Control of Ultrahigh Precision Piezoelectric Nanopositioner

This paper presents a new control method for high precision positioning of a monolithic cruciform piezoelectric actuator system which contains circuital nonlinearities as well as uncertainties. The proposed Model Reference Zero Vibration (MRZV) control combines the advantages of model reference and input shaping, is introduced to control such ultrahigh positioning devices whose nonlinear characteristics can hardly be modeled precisely enough in the scale of nanometers. The transient response and performance of this cruciform piezoelectric actuator is improved without requiring the explicit knowledge of an accurate model of the parasitic nonlinearities. Experimental results confirm the effectiveness and practicality of high precision positioning actuator with proposed model reference control method.