Opto-Acoustic Method for the Characterization of Thin-Film Adhesion

被引：1

作者：

Yoshida, Sanichiro ^{[1
]}

Didie, David R. ^{[1
]}

Didie, Daniel ^{[1
]}

Sasaki, Tomohiro ^{[2
]}

Park, Hae-Sung ^{[3
]}

Park, Ik-Keun ^{[4
]}

Gurney, David ^{[1
]}

机构：

[1] Southeastern Louisiana Univ, Dept Chem & Phys, SLU 10878, Hammond, LA 70402 USA

[2] Niigata Univ, Dept Mech Engn, Nishi Ku, Niigata, Niigata 9502181, Japan

[3] Seoul Natl Univ Sci & Technol, Grad Sch, Dept Mech Engn, Seoul 01811, South Korea

[4] Seoul Natl Univ Sci & Technol, Dept Mech & Automot Engn, Seoul 01811, South Korea

来源：

APPLIED SCIENCES-BASEL | 2016年 / 6卷 / 06期

基金：

新加坡国家研究基金会;

关键词：

thin-film coating; optical interferometer; opto-acoustic techniques;

D O I：

10.3390/app6060163

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The elastic property of the film-substrate interface of thin-film systems is characterized with an opto-acoustic method. The thin-film specimens are oscillated with an acoustic transducer at audible frequencies, and the resultant harmonic response of the film surface is analyzed with optical interferometry. Polystyrene, Ti, Ti-Au and Ti-Pt films coated on the same silicon substrate are tested. For each film material, a pair of specimens is prepared; one is coated on a silicon substrate after the surface is treated with plasma bombardment, and the other is coated on an identical silicon substrate without a treatment. Experiments indicate that both the surface-treated and untreated specimens of all film materials have resonance in the audible frequency range tested. The elastic constant of the interface corresponding to the observed resonance is found to be orders of magnitude lower than that of the film or substrate material. Observations of these resonance-like behaviors and the associated stiffness of the interface are discussed.

引用

页数：19

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