Magnetic studies of Ni-Fe thin films prepared by dc sputtering

被引:7
作者
Neamtu, J
机构
[1] Institute of Microtechnology, Bucharest R-72225
关键词
dc sputtering; high frequency; low losses; multilayer films; Ni-Fe;
D O I
10.1016/0304-8853(95)01152-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The magnetic properties of Ni-Fe (permalloy) monolayer and alternating Ni-Fe/SiO2 multilayer thin films prepared by de sputtering have been investigated. In the case of multilayer thin films the relative permeability at high frequencies is much improved, confirming the existence of a magnetostatic coupling between the 0.2 mu m thin magnetic layers. Also, the losses are lower and the permeability is stable up to 10 MHz.
引用
收藏
页码:461 / 462
页数:2
相关论文
共 8 条
[2]  
CIUREANU P, 1983, THESIS
[3]   MAGNETIC DOMAIN-STRUCTURES IN MULTILAYERED NIFE FILMS [J].
HERD, SR ;
AHN, KY .
JOURNAL OF APPLIED PHYSICS, 1979, 50 (03) :2384-2386
[4]  
LAZZARI JP, 1970, THESIS
[5]   MAGNETIC-PROPERTIES OF SPUTTERED CO-NI-FE-PD FILMS FOR THIN-FILM HEADS [J].
NISHIOKA, K ;
IMAGAWA, T ;
SANO, M ;
MITSUOKA, K ;
NARISHIGE, S ;
SUGITA, Y .
IEEE TRANSACTIONS ON MAGNETICS, 1989, 25 (03) :2602-2606
[6]   BATCH FABRICATION OF THIN-FILM MAGNETIC RECORDING HEADS - LITERATURE REVIEW AND PROCESS DESCRIPTION FOR VERTICAL SINGLE TURN HEADS [J].
ROMANKIW, LT ;
SIMON, P .
IEEE TRANSACTIONS ON MAGNETICS, 1975, MA11 (01) :50-55
[8]  
Senda M., 1993, IEEE Translation Journal on Magnetics in Japan, V8, P161, DOI 10.1109/TJMJ.1993.4565597