Height measurement of microchip connecting pins by use of stereovision

被引：4

作者：

Tay, CJ

Kang, X

Quan, CG

He, XY

Shang, HM

机构：

[1] Natl Univ Singapore, Dept Engn Mech, Singapore 119260, Singapore

[2] Southeast Univ, Dept Engn Mech, Nanjing 210096, Peoples R China

来源：

APPLIED OPTICS | 2003年 / 42卷 / 19期

关键词：

D O I：

10.1364/AO.42.003827

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A stereovision method for estimating the height of connecting pins on a microchip is described. The technique uses a centroidal method to simplify the calculation. A few seconds are required for a Pentium 586 PC to calculate the heights of 300 connecting pins on a 50 mm x 50 mm. microchip. The method is described, and experimental results are presented. The optical system, which consists of two CCD cameras with long-focal-length lenses and a two-channel digital image grabber, is capable of in situ measurement. (C) 2003 Optical Society of America.

引用

页码：3827 / 3831

页数：5

共 17 条

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