Hybrid numerical simulation of electrostatic force microscopes considering charge distribution

被引：0
|
作者：
Bala, U. B. [1 ]
Greiff, M. [1 ]
Mathis, W. [1 ]
机构：
[1] Leibniz Univ Hannover, Inst Electromagnet Theory, Hannover, Germany
来源：
PIERS 2007 BEIJING: PROGRESS IN ELECTROMAGNETICS RESEARCH SYMPOSIUM, PTS I AND II, PROCEEDINGS | 2007年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The electrostatic force microscope (EFM) is an important tool for imaging and characterizing material surfaces. In this paper a hybrid numerical approach for the simulation of the EFM considering charge distribution inside the sample under investigtion is presented. In the simulation model electrical part is considered. In this paper first a basic knowledge on the EFM and then the numerical model of the EFM considering volume charge distribution are presented. At last several numerical simulation results of the EFM in 3D are pesented.
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页码：1118 / +
页数：2
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