Variable wave plate via tunable form-birefringent structures

被引：6

作者：

Wilson, Benjamin K. ^{[1
]}

Lin, Lih Y. ^{[1
]}

机构：

[1] Univ Washington, Dept Elect Engn, Seattle, WA 98195 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2008年 / 17卷 / 04期

基金：

美国国家卫生研究院; 美国国家科学基金会;

关键词：

form birefringence; nanoimprint lithography (NIL); optical polarization; tunable wave plate;

D O I：

10.1109/JMEMS.2008.927744

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We propose a compact and low-cost design for a variable wave plate using tunable form-birefringent grating structures in polydimethylsiloxane (PDMS). The described device operates through PDMS deformation via electrostatically actuated transparent electrodes. The optical and mechanical properties of tunable form-birefringent structures are modeled using birefringence, rigorous coupled-wave analysis, and simple structural mechanics theory. The device is fabricated by a form of soft nanoimprint lithography. The optical properties are characterized for different structure geometries. Operating principles were verified through testing of the completed device. The experimental results and theoretical study show that an irregular grating structure performs better than a periodic subwavelength structure.

引用

页码：1039 / 1046

页数：8