Gas sensing characteristics of the FET-type gas sensor having inkjet-printed WS2 sensing layer

被引：38

作者：

Jeong, Yujeong ^{[1
,2
]}

Shin, Jongmin ^{[1
,2
]}

Hong, Yoonki ^{[1
,2
]}

Wu, Meile ^{[1
,2
]}

Hong, Seongbin ^{[1
,2
]}

Kwon, Ki Chang ^{[3
]}

Choi, Seokhoon ^{[3
]}

Lee, Taehyung ^{[3
]}

Jang, Ho Won ^{[3
]}

Lee, Jong-Ho ^{[1
,2
]}

机构：

[1] Seoul Natl Univ, Dept Elect & Comp Engn, Seoul 08826, South Korea

[2] Seoul Natl Univ, ISRC, Seoul 08826, South Korea

[3] Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 08826, South Korea

来源：

SOLID-STATE ELECTRONICS | 2019年 / 153卷

基金：

新加坡国家研究基金会;

关键词：

MOSFET; WS2; Gas sensor; Inkjet printing; MOS2;

D O I：

10.1016/j.sse.2018.12.009

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper investigates the gas sensing characteristics of the MOSFET-type sensor having an inkjet-printed WS2 sensing layer. The drain current of the gas sensor increases when NO2 gas is injected into the test chamber since NO2 gas is an oxidizing gas that extracts electrons from the sensing layer. On the contrary, the drain current decreases when H2S gas is injected into the test chamber since H2S gas is a reducing gas that donates electrons to the sensing layer. In both cases, the change of the drain current increases as the gas concentration increases. However, for other gases (NH3 and CO2), the gas sensor has a small change of the drain current. The responses of the gas sensor to 10 ppm NO2, H2S, NH3, and CO2 gases are 15.20%, 7.18%, 1.66%, and 3.02%, respectively. Therefore, the WS2 sensor has a high selectivity for NO2 gas among the four target gases.

引用

页码：27 / 32

页数：6

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