Thermally modulated multi sensor arrays of SnO2/additive/electrode combinations for enhanced gas identification

被引：25
作者：
Illyaskutty, Navas [1 ]
Knoblauch, Jens [1 ]
Schwotzer, Matthias [2 ]
Kohler, Heinz [1 ]
机构：
[1] Karlsruhe Univ Appl Sci, Inst Sensor & Informat Syst, D-76133 Karlsruhe, Germany
[2] KIT, Inst Funct Interfaces, D-76344 Eggenstein Leopoldshafen, Germany
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2015年 / 217卷
关键词：
Gas sensor; SnO2; Gas identification; Thermo-cyclic operation; Dynamic conductance; Electrode metallization; THICK-FILM SENSORS; VOLATILE ORGANIC-COMPOUNDS; SURFACE-STATE MODEL; CONDUCTANCE RESPONSES; TEMPERATURE MODULATION; FEATURE-EXTRACTION; AC MEASUREMENTS; SNO2; METAL; CO;
D O I：
10.1016/j.snb.2015.03.018
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
We report the development of a multi sensor array integrated with four different layers of tin oxide/additive combinations, which operates thermo-cyclically by triangular heater voltages, for specific gas identification. These multi sensor arrays could yield simultaneously four different patterns of dynamic conductance, which can be used for specific gas component analysis. Pure SnO2, SnO2/Sb2O3, SnO2/Sb2O3/La2O3 and SnO2/Sb2O3/CuO were used as sensing materials on a single chip with Au or Pt as electrode material to study the response behavior to propene, CO and methane at different concentrations and temperature rates/cycle time. The nature of the specific gas recognition patterns is highly determined by additive material, electrode metallization, temperature rate, type of gas and gas concentration. The specific gas behavior is discussed in connection with the reaction processes taking place at the pores of the sensing layer and at the triple phase boundary of layer, electrode and gas. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码：2 / 12
页数：11
相关论文
共 72 条
[31]   Gas sensing behavior of a single tin dioxide sensor under dynamic temperature modulation [J].
Huang, XJ ;
Meng, FL ;
Pi, ZX ;
Xu, WH ;
Liu, JH .
SENSORS AND ACTUATORS B-CHEMICAL, 2004, 99 (2-3) :444-450
[32]   The Structure and Behavior of Platinum in SnO2-Based Sensors under Working Conditions [J].
Huebner, Michael ;
Koziej, Dorota ;
Bauer, Matthias ;
Barsan, Nicolae ;
Kvashnina, Kristina ;
Rossell, Marta D. ;
Weimar, Udo ;
Grunwaldt, Jan-Dierk .
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 2011, 50 (12) :2841-2844
[33]   Hydrogen and ethanol sensing properties of molybdenum oxide nanorods based thin films: Effect of electrode metallization and humid ambience [J].
Illyaskutty, Navas ;
Kohler, Heinz ;
Trautmann, Thomas ;
Schwotzer, Matthias ;
Pillai, V. P. Mahadevan .
SENSORS AND ACTUATORS B-CHEMICAL, 2013, 187 :611-621
[34]   Response model for thermally modulated tin oxide-based microhotplate gas sensors [J].
Ionescu, R ;
Llobet, E ;
Al-Khalifa, S ;
Gardner, JW ;
Vilanova, X ;
Brezmes, J ;
Correig, X .
SENSORS AND ACTUATORS B-CHEMICAL, 2003, 95 (1-3) :203-211
[35]   Micromachined thin film SnO2 gas sensors in temperature-pulsed operation mode [J].
Jaegle, M ;
Wöllenstein, J ;
Meisinger, T ;
Böttner, H ;
Müller, G ;
Becker, T ;
Bosch-von Braunmühl, C .
SENSORS AND ACTUATORS B-CHEMICAL, 1999, 57 (1-3) :130-134
[36]   New applications of tin oxide gas sensors II. Intelligent sensor system for reliable monitoring of ammonia leakages [J].
Jerger, A ;
Kohler, H ;
Becker, F ;
Keller, HB ;
Seifert, R .
SENSORS AND ACTUATORS B-CHEMICAL, 2002, 81 (2-3) :301-307
[37]  
Knoblauch J., 2015, SENS ACTUATORS B
[38]   SURFACE PROCESSES IN THE DETECTION OF REDUCING GASES WITH SNO2-BASED DEVICES [J].
KOHL, D .
SENSORS AND ACTUATORS, 1989, 18 (01) :71-113
[39]   New applications of tin oxide gas sensors -: I.: Molecular identification by cyclic variation of the working temperature and numerical analysis of the signals [J].
Kohler, H ;
Röber, J ;
Link, N ;
Bouzid, I .
SENSORS AND ACTUATORS B-CHEMICAL, 1999, 61 (1-3) :163-169
[40]   Temperature modulation in semiconductor gas sensing [J].
Lee, AP ;
Reedy, BJ .
SENSORS AND ACTUATORS B-CHEMICAL, 1999, 60 (01) :35-42
12345678