A simulation study on bridge defects in lamellae-forming diblock copolymers

被引:1
|
作者
Sato, Hironobu [1 ]
Kodera, Katsuyoshi [1 ]
Seino, Yuriko [1 ]
Kasahara, Yusuke [1 ]
Miyagi, Ken [1 ]
Shiraishi, Masayuki [1 ]
Azuma, Tsukasa [1 ]
机构
[1] Evolving Nano Proc Infrastruct Dev Ctr Inc EIDEC, 16-1 Onogawa, Tsukuba, Ibaraki 3058569, Japan
来源
ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXV | 2018年 / 10586卷
关键词
DSA; Bridge defects; SCFT simulation;
D O I
10.1117/12.2297287
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper we will describe a self-consistent field theory simulation study on bridge defects in lamellae-forming diblock copolymers. Because the bridge defects are buried three-dimensional defects formed in the diblock copolymer film, it is difficult to observe and determine what causes them. To determine the cause of the bridge defects effectively, self-consistent field theory simulations were used. By reproducing structural characteristics of the bridge defects in the simulation, the cause of the bridge defects were clarified. Finally, we discussed ways to prevent the bridge defects.
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页数:7
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