Fluorine doping in transparent conductive ZnO thin films by a sol-gel method using trifluoroacetic acid

被引：29

作者：

Fujihara, S ^{[1
]}

Kusakado, J ^{[1
]}

Kimura, T ^{[1
]}

机构：

[1] Keio Univ, Dept Appl Chem, Kohoku Ku, Yokohama, Kanagawa 223, Japan

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1998年 / 17卷 / 09期

关键词：

D O I：

10.1023/A:1006647919562

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：781 / 783

页数：3

共 14 条

[1] OXYGEN-CHEMISORPTION ON TIN OXIDE - CORRELATION BETWEEN ELECTRICAL-CONDUCTIVITY AND ELECTRON-PARAMAGNETIC-RES MEASUREMENTS [J].

CHANG, SC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01) :366-369

[2] Preparation and characterization of MgF2 thin film by a trifluoroacetic acid method [J].

Fujihara, S ;

Tada, M ;

Kimura, T .

THIN SOLID FILMS, 1997, 304 (1-2) :252-255

[3]

FUJIHARA S, 1997, P 9 INT S SUP SAPP O, P441

[4]

HU J, 1991, MATER RES SOC SYMP P, V202, P457

[5] ATMOSPHERIC-PRESSURE CHEMICAL VAPOR-DEPOSITION OF GALLIUM DOPED ZINC-OXIDE THIN-FILMS FROM DIETHYL ZINC, WATER, AND TRIETHYL GALLIUM [J].

HU, JH ;

GORDON, RG .

JOURNAL OF APPLIED PHYSICS, 1992, 72 (11) :5381-5392

[6] TEXTURED FLUORINE-DOPED ZNO FILMS BY ATMOSPHERIC-PRESSURE CHEMICAL VAPOR-DEPOSITION AND THEIR USE IN AMORPHOUS-SILICON SOLAR-CELLS [J].

HU, JH ;

GORDON, RG .

SOLAR CELLS, 1991, 30 (1-4) :437-450

[7] TEXTURED ALUMINUM-DOPED ZINC-OXIDE THIN-FILMS FROM ATMOSPHERIC-PRESSURE CHEMICAL-VAPOR DEPOSITION [J].

HU, JH ;

GORDON, RG .

JOURNAL OF APPLIED PHYSICS, 1992, 71 (02) :880-890

[8] DEPOSITION OF BORON DOPED ZINC-OXIDE FILMS AND THEIR ELECTRICAL AND OPTICAL-PROPERTIES [J].

HU, JH ;

GORDON, RG .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (07) :2014-2022

[9] THE EFFECTS OF DEPOSITION RATE ON THE STRUCTURAL AND ELECTRICAL-PROPERTIES OF ZNO-AL FILMS DEPOSITED ON (1120) ORIENTED SAPPHIRE SUBSTRATES [J].

IGASAKI, Y ;

SAITO, H .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (07) :3613-3619

[10] Sol-gel synthesis of ZnO thin films [J].

Kamalasanan, MN ;

Chandra, S .

THIN SOLID FILMS, 1996, 288 (1-2) :112-115

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