Chip-less wireless electronic skins by remote epitaxial freestanding compound semiconductors

被引：158

作者：

Kim, Yeongin ^{[1
,2
,3
]}

Suh, Jun Min ^{[1
,2
]}

Shin, Jiho ^{[1
,2
]}

Liu, Yunpeng ^{[1
,2
]}

Yeon, Hanwool ^{[1
,2
,4
]}

Qiao, Kuan ^{[1
,2
]}

Kum, Hyun S. ^{[1
,2
,5
]}

Kim, Chansoo ^{[1
,2
]}

Lee, Han Eol ^{[1
,2
,6
]}

Choi, Chanyeol ^{[7
]}

Kim, Hyunseok ^{[1
,2
]}

Lee, Doyoon ^{[1
,2
]}

Lee, Jaeyong ^{[1
]}

Kang, Ji-Hoon ^{[2
]}

Park, Bo-In ^{[2
]}

Kang, Sungsu ^{[8
]}

Kim, Jihoon ^{[8
]}

Kim, Sungkyu ^{[9
]}

Perozek, Joshua A. ^{[7
]}

Wang, Kejia ^{[1
,10
]}

Park, Yongmo ^{[1
]}

Kishen, Kumar ^{[1
]}

Kong, Lingping ^{[1
]}

Palacios, Tomas ^{[7
]}

Park, Jungwon ^{[8
,11
]}

Park, Min-Chul ^{[12
]}

Kim, Hyung-Jun ^{[12
,13
]}

Lee, Yun Seog ^{[14
]}

Lee, Kyusang ^{[15
]}

Bae, Sang-Hoon ^{[1
,16
]}

Kong, Wei ^{[1
,17
]}

Han, Jiyeon ^{[18
]}

Kim, Jeehwan ^{[1
,2
,19
]}

机构：

[1] MIT, Dept Mech Engn, Cambridge, MA 02139 USA

[2] MIT, Res Lab Elect, Cambridge, MA 02139 USA

[3] Univ Cincinnati, Dept Elect Engn & Comp Sci, Cincinnati, OH 45219 USA

[4] Gwangju Inst Sci & Technol, Sch Mat Sci & Engn, Gwangju 61005, South Korea

[5] Yonsei Univ, Dept Elect & Elect Engn, Seoul 03722, South Korea

[6] Jeonbuk Natl Univ, Div Adv Mat Engn, Jeonju 54896, South Korea

[7] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA

[8] Seoul Natl Univ, Sch Chem & Biol Engn, Inst Chem Proc, Seoul 08826, South Korea

[9] Sejong Univ, Dept Nanotechnol & Adv Mat Engn, Seoul 05006, South Korea

[10] Zhejiang Univ, Sch Micronano Elect, Hangzhou 311200, Zhejiang, Peoples R China

[11] Inst Basic Sci IBS, Ctr Nanoparticle Res, Seoul 08826, South Korea

[12] Korea Inst Sci & Technol KIST, Postsilicon Semicond Inst, Seoul 02792, South Korea

[13] Korea Univ Sci & Technol, KIST Sch, Div Nano & Informat Technol, Seoul 02792, South Korea

[14] Seoul Natl Univ, Dept Mech Engn, Seoul 08826, South Korea

[15] Univ Virginia, Dept Elect & Comp Engn, Charlottesville, VA 22904 USA

[16] Washington Univ, Inst Mat Sci & Engn, Dept Mech Engn & Mat Sci, St Louis, MO 63139 USA

[17] Westlake Univ, Dept Mat Sci & Engn, Hangzhou 310024, Zhejiang, Peoples R China

[18] Amorepacif R&D Ctr, Skincare Div, Yongin 17074, South Korea

[19] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

来源：

SCIENCE | 2022年 / 377卷 / 6608期

关键词：

KLEBSIELLA-PNEUMONIAE NITROGENASE; STEADY-STATE KINETICS; STRUCTURAL EVIDENCE; N-2; REDUCTION; MOFE-PROTEIN; MECHANISM; BINDING; REACTIVITY; COMPLEXES; FIXATION;

D O I：

10.1126/science.abn7325

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Recent advances in flexible and stretchable electronics have led to a surge of electronic skin (e-skin)based health monitoring platforms. Conventional wireless e-skins rely on rigid integrated circuit chips that compromise the overall flexibility and consume considerable power. Chip-less wireless e-skins based on inductor-capacitor resonators are limited to mechanical sensors with low sensitivities. We report a chipless wireless e-skin based on surface acoustic wave sensors made of freestanding ultrathin single-crystalline piezoelectric gallium nitride membranes. Surface acoustic wave-based e-skin offers highly sensitive, low-power, and long-term sensing of strain, ultraviolet light, and ion concentrations in sweat. We demonstrate weeklong monitoring of pulse. These results present routes to inexpensive and versatile low-power, high-sensitivity platforms for wireless health monitoring devices.

引用

页码：859 / 869

页数：11

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