[1] Tsinghua Univ, Sch Mat Sci & Engn, Laser Mat Proc Res Ctr, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
[3] Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China