Fabrication of a Ni-matrix CNT flexible field emission electron source for X-ray generation by micromachining

被引:11
作者
Sun, Bin [1 ]
Wang, Yan [1 ]
Ding, Guifu [1 ]
机构
[1] Shanghai Jiao Tong Univ, Sch Elect Informat & Elect Engn, Natl Key Lab Micro Nano Fabricat Technol, Shanghai 200240, Peoples R China
基金
高等学校博士学科点专项科研基金; 中国国家自然科学基金;
关键词
CARBON NANOTUBES; EMITTERS; FILMS; OXIDE;
D O I
10.1364/OME.6.002304
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper reports a Ni-matrix CNT flexible field emission electron source fabricated by a novel implanting micromachining technology. For the first time, we could implant nano-scale materials into milli-scale metal substrates at room temperature. By embedding CNT roots into Ni film using polymer matrix as transfer media, effective contact between Ni and CNTs was achieved. As a result, our novel emitter shows relatively good field emission properties such as low turn on field and good stability. Moreover, the emitter was highly flexible with preservation of the field emission properties. The excellent field emission characteristics were attributed to the direct contact and the strong interactions between CNTs and the substrate. To check the practical application of the novel emitter, a simplified X-ray imaging system was set up by modifying a traditional tube. The grey shadow that appears on the sensitive film after exposing to the radiation confirms the X-ray generation. (C) 2016 Optical Society of America
引用
收藏
页码:2304 / 2312
页数:9
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