A shape memory microcage of TiNi/DLC films for biological applications

被引：27

作者：

Fu, Y. Q. ^{[1
,2
]}

Luo, J. K. ^{[1
,3
]}

Ong, S. E. ^{[4
]}

Zhang, S. ^{[4
]}

Flewitt, A. J. ^{[1
]}

Milne, W. I.

机构：

[1] Univ Cambridge, Dept Engn, Cambridge CB0 3FA, England

[2] Heriot Watt Univ, Sch Engn & Phys Sci, Dept Mech Engn, Edinburgh EH14 4AS, Midlothian, Scotland

[3] Univ Bolton, Ctr Mat Res & Innovat, Bolton BL3 5AB, England

[4] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore 639798, Singapore

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2008年 / 18卷 / 03期

关键词：

D O I：

10.1088/0960-1317/18/3/035026

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A TiNi/diamond-like-carbon (DLC) microcage has been designed for biological applications. The structure is composed of a top layer of TiNi film and a bottom layer of highly compressively stressed DLC for upward bending once released from the substrate. The fingers of the microcage quickly close through the shape memory effect once the temperature reaches the austenite start transformation point to execute the gripping action. Opening the microcage is realized by either decreasing the temperature to make use of the martensitic transformation or further increasing the temperature to use the bimorph thermal effect. The biocompatibility of both the TiNi and DLC films has been investigated using a cell-culture method.

引用

页数：8

共 19 条

[1] Microactuators of free-standing TiNiCu films [J].

Fu, Y. Q. ;

Luo, J. K. ;

Flewitt, A. J. ;

Ong, S. E. ;

Zhang, S. ;

Du, H. J. ;

Milne, W. I. .

SMART MATERIALS AND STRUCTURES, 2007, 16 (06) :2651-2657

[2] On the lower thickness boundary of sputtered TiNi films for shape memory application [J].

Fu, Y. Q. ;

Zhang, Sam ;

Wu, M. J. ;

Huang, W. M. ;

Du, H. J. ;

Luo, J. K. ;

Flewitt, A. J. ;

Milne, W. I. .

THIN SOLID FILMS, 2006, 515 (01) :80-86

[3] XPS characterization of surface and interfacial structure of sputtered TiNi films on Si substrate [J].

Fu, YQ ;

Du, HJ ;

Zhang, S ;

Huang, WM .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2005, 403 (1-2) :25-31

[4]

FUY YQ, 2004, SENSOR ACTUAT A-PHYS, V112, P395

[5] Manufacturing issues of thin film NiTi microwrapper [J].

Gill, JJ ;

Chang, DT ;

Momoda, LA ;

Carman, GP .

SENSORS AND ACTUATORS A-PHYSICAL, 2001, 93 (02) :148-156

[6]

GRILL A, 1997, SURF COAT TECH, V507, P94

[7] Thickness effect on shape memory behavior of Ti-50.0at.%Ni thin film [J].

Ishida, A ;

Sato, M .

ACTA MATERIALIA, 2003, 51 (18) :5571-5578

[8] SMA microgripper system [J].

Kohl, M ;

Krevet, B ;

Just, E .

SENSORS AND ACTUATORS A-PHYSICAL, 2002, 97-8 :646-652

[9] Thin film shape memory alloy microactuators [J].

Krulevitch, P ;

Lee, AP ;

Ramsey, PB ;

Trevino, JC ;

Hamilton, J ;

Northrup, MA .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1996, 5 (04) :270-282

[10] Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure [J].

Luo, J. K. ;

Huang, R. ;

He, J. H. ;

Fu, Y. Q. ;

Flewitt, A. J. ;

Spearing, S. M. ;

Fleck, N. A. ;

Milne, W. I. .

SENSORS AND ACTUATORS A-PHYSICAL, 2006, 132 (01) :346-353

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