共 26 条
- [2] Integrated electronic module for controlling a turbomolecular pump [J]. 24TH INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY: CONCURRENT ENGINEERING IN ELECTRONIC PACKAGING, CONFERENCE PROCEEDINGS, 2001, : 212 - 214
- [3] Adaptive variable structure controller design of turbomolecular pump with active magnetic bearings [J]. ICIEA 2008: 3RD IEEE CONFERENCE ON INDUSTRIAL ELECTRONICS AND APPLICATIONS, PROCEEDINGS, VOLS 1-3, 2008, : 1060 - 1065
- [4] Han J.Q., 2008, The Technique for Estimating and Compensating the Uncertainties: Active Disturbance Rejection Control Technique
- [6] Jeong S., IEEE T IND ELECT