Influence of surface energy and elastic strain energy on the graphene growth in chemical vapor deposition

被引:6
作者
Sirat, Mohamad Shukri [1 ]
Ismail, Edhuan [1 ]
Ramlan, Amir Hakimi [1 ]
Fauzi, Fatin Bazilah [1 ]
Yaacob, Iskandar Idris [1 ]
Mohamed, Mohd Ambri [2 ]
Azam, Mohd Asyadi [3 ]
Ani, Mohd Hanafi [1 ]
机构
[1] Int Islamic Univ Malaysia, Dept Mfg & Mat Engn, Kulliyyah Engn, Jalan Gombak, Kuala Lumpur 53100, Malaysia
[2] Univ Kebangsaan Malaysia, Inst Microengn & Nanoelect, Bangi 43600, Malaysia
[3] Univ Tekn Malaysia Melaka, Fac Mfg, Dept Engn Mat, Durian Tunggal 76100, Melaka, Malaysia
关键词
Graphene; CVD; Surface Energy; Elastic Strain Energy; Lattice Mismatch; Crystal Orientation;
D O I
10.1016/j.matpr.2018.12.074
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Polycrystalline metal substrates such as copper (Cu) have been intensively used to grow graphene in chemical vapor deposition (CVD) technique. It has been observed that crystal orientations affect the quality of graphene produced to some degree. The existence of crystal orientations caused graphene to grow randomly on top of Cu which also resulted on the formation of polycrystalline graphene. Despite this, the influence of crystal orientations on the quality of graphene produced are not yet fully understood. There are two possible factors that could affect graphene growth from crystal orientation point of view; surface energy and elastic strain energy. The understanding towards these both factors might beneficial to control the quality of graphene. This paper thus aims to highlight the influence of surface energy and elastic strain energy on the graphene growth in CVD. Substrate used were single crystal Cu with (111), (110) and (100) orientations. The graphene was grown inside a closed reaction chamber with the presence of argon (Ar), hydrogen (H-2) and methane (CH4) gases with partial pressure ratio of 0.6: 0.2: 0.2 at 1 atm, 1000 degrees C in 30 minutes. The quality of the as-grown graphene was identified using Raman spectroscopy. The Raman spectra show the existence of graphene peak for all the Cu substrates. The calculation of I-D/I-G ratio revealed that the Cu (100) possessed the lowest amount of defects compared to Cu(110) and Cu(111). While I-2D/I-G ratio fluctuated between 0.22 to 0.34 suggested that the crystal orientation does not control the thickness of graphene layer at these reaction conditions. The usage of higher CH4 partial pressure produced a thicker graphene. It is assumed that the thickness of the graphene exceeded the critical thickness thus elastic strain energy becomes the dominant factor in controlling graphene growth. Larger lattice mismatch causes major defects on graphene and this result has been shown in graphene grown on top of Cu(111). These findings thus would give a new insight to tailor the high-quality large-area graphene growth in CVD. (C) 2018 Elsevier Ltd. All rights reserved. Selection and peer-review under responsibility of the scientific committee of the Nanotech Malaysia 2018.
引用
收藏
页码:776 / 783
页数:8
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共 20 条
  • [1] [Anonymous], PHYS REV LETT
  • [2] Production and processing of graphene and 2d crystals
    Bonaccorso, Francesco
    Lombardo, Antonio
    Hasan, Tawfique
    Sun, Zhipei
    Colombo, Luigi
    Ferrari, Andrea C.
    [J]. MATERIALS TODAY, 2012, 15 (12) : 564 - 589
  • [3] Bragg WL, 1914, P CAMB PHILOS SOC, V17, P43
  • [4] Brock S.L., 2004, Nanostructures and Nanomaterials: Synthesis, Properties and Applications, V126, P14679, DOI DOI 10.1021/JA0409457
  • [5] Childres I., 2013, New Dev.Photon Mater. Res, V1, P1
  • [6] Dean J.A., 2001, Lange's Handbook of Chemistry, V15
  • [7] Characterizing Graphene, Graphite, and Carbon Nanotubes by Raman Spectroscopy
    Dresselhaus, M. S.
    Jorio, A.
    Saito, R.
    [J]. ANNUAL REVIEW OF CONDENSED MATTER PHYSICS, VOL 1, 2010, 1 : 89 - 108
  • [8] Ferrari A. C., PHYS REV LETT, V97, P1
  • [9] Epitaxial Graphene on Cu(111)
    Gao, Li
    Guest, Jeffrey R.
    Guisinger, Nathan P.
    [J]. NANO LETTERS, 2010, 10 (09) : 3512 - 3516
  • [10] Guo Z, 2009, ART HSE NANO SCI ENG, P3