UHF CMOS-MEMS Bulk Acoustic Wave Resonator

被引：0

作者：

Giner, J. ^{[1
]}

Uranga, A. ^{[1
]}

Marigo, E. ^{[1
]}

Munoz-Gamarra, J. L. ^{[1
]}

Barniol, N. ^{[1
]}

机构：

[1] Univ Autonoma Barcelona, Dept Elect Engn, E-08193 Barcelona, Spain

来源：

2011 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM/EUROPEAN FREQUENCY AND TIME FORUM PROCEEDINGS | 2011年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a UHF CMOS MEMS resonator working at 384MHz at its bulky mechanical mode. The novel topology proposed allows us to design the resonator taking into account the coupling area of the movable resonator as an important parameter in the design. The structure is fabricated using a commercial CMOS technology. This fact allows to integrate directly the microelectromechanical structure with the electronic. This work presents the measurement of both, the stand alone resonator and the resonator with an amplification circuitry.

引用

页码：151 / 154

页数：4

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